Inertial

Found 17 technologies within Inertial RSS ATOM

High-Performance Resonators for Gyroscopes

6761 – Maximizing quality (Q) factor, ability of system to keep energy, is key to enhancing the performance of mechanical resonators. To maximize Q-factor of a resonator, its dissipation mechanisms should be carefully investigated and reduced. Most phenomena, which increase energy dissipation in a resonator, can be reduced by a proper choice of resonator’s material. However, anchor loss, which is... Read More

Cross-sectional SEM of a microstructure shell produced in a reflow molding process. This structure is suitable for use as a resonator in a vibratory gyroscope.

Mold for Making Highly Symmetric Three Dimensional Microstructures

7175 – This technology offers improvements to the creation of axisymmetric microstructures that are well-suited for use as a resonator in vibratory gyroscopes. Gyroscopes measure angular motion and they are a vital component in internal measurement units, which monitor and guide the motion of aircrafts and unmanned vehicles. Miniaturization of devices and the use of microelectromechanical systems,... Read More

Low-Noise Large Dynamic Range Multi-Axis Accelerometers Made From Thick Silicon

6986 – Capacitive accelerometers and inertial measurement units are used in a wide range of applications such as smart phones and tablets, aerospace navigation, and industrial testing and measurement. By 2019, the revenue for microelectromechanical system (MEMS) accelerometers and gyroscopes is expected to reach $5 billion, and miniaturization is the critical product feature [1]. Several device... Read More

Three-Dimensional Rate-Integrating Gyroscope and Fabrication Process

6997 – Gyroscopes are sensors that measure the rate of rotation and angular orientation of an object. Advances in micro electromechanical system (MEMS) allow MEMS gyroscope manufacturing at low cost with sufficient accuracy. MEMS gyroscopes are used in portable electronics such as smart phones as well as in the stabilization of cameras, factory machines, and cars. Navigational systems, e.g., in... Read More

Assembly Processes for Three-Dimensional Microstructures

6985 – High-performance Micro Electromechanical System (MEMS) sensors and actuators have been commercialized in a variety of applications including motion sensing, wireless communication, energy harvesting, and healthcare. Micro assembly processes are often employed for creating micro sensors and actuators, and they can create more complex micro devices than single-piece, or monolithic, fabrication... Read More

Actuation and Sensing Platform for Sensor Calibration and Vibration Isolation

6571 – A micro-platform with integrated multi-axis actuation and position sensing capabilities for in-situ calibration of long-term scale-factor drifts in the output signals of micromachined inertial measurement units, has been developed at the University of Michigan. The use of micromachined inertial measurement units, such as MEMS accelerometers and gyroscopes, in high accuracy strategic and... Read More

Three Dimensional Microstructures and Fabrication Process of Micro-scale Navigation Grade Rate Integrating Gyroscope for GPS-free Guidance

6500 – Recent advances in micro-electromechanical system (MEMS) technologies resulted in the successful commercialization of high-performance sensors and actuators in a variety of areas such as motion sensing, wireless communication, energy harvesting, and healthcare. The performance of most MEMS sensors and actuators are limited by materials along with their structures and because of their low... Read More

Single-side Microelectromechanical Capacitive Accelerometer and Method of Making Same

1644d2 – UM File # 1644d2 Background Accelerometers are often utilized in various applications including navigation, guidance, microgravity measurements, seismology and platform stabilization. Conventional accelerometers are fabricated by either surface- or bulk-micromachining. The surface-micromachined devices are fabricated on a single silicon wafer, but bear low sensitivity and large noise... Read More

Single-side Microelectromechanical Capacitive Accelerometer and Method of Making Same

1644d1 – UM File # 1644d1 Background Accelerometers are often utilized in various applications including navigation, guidance, microgravity measurements, seismology and platform stabilization. Conventional accelerometers are fabricated by either surface- or bulk-micromachining. The surface-micromachined devices are fabricated on a single silicon wafer, but bear low sensitivity and large noise... Read More

Fused Silica Microsensors, Microactuators, Packaging, and Microsystems

5196 – MEMS inertial measurement units (IMUs) are currently manufactured using hybrid integration at the system level. While co-fabrication of components has been proposed, it has yet to produce a useful implementation of IMUs. Major challenges include large component size, inadequate performance, device coupling, and conflicting process and package requirements for accelerometers, gyroscopes... Read More

Micromachined Rate-Integrating Gyroscopes

5038 – Navigation applications that require precise position tracking are driving the demand for gyroscopes with higher accuracies and smaller sizes, especially for scenarios where GPS information is limited. Most current micro-gyroscopes are rate gyroscopes (RG). RGs suffer from inaccuracies over time due to the buildup of rate noise during the integration process. Rate-integrating gyroscopes... Read More

A Micromachined In-plane Silicon Accelerometer with a Combined Surface and Bulk Micromachining Technology

2491 – Applications of microaccelerometers cover a wide range from those which require low/medium sensitivity sensors, to those used in inertial navigation/guidance systems, seismometry, or microgravity measurements, which demand high sensitivity with very low noise floor. Among various sensing methods, the capacitive sensing technique has recently gained attention as it provides high... Read More

Integrated Silicon Automotive Accelerometer and Single-point Impact Sensor

1910 – Passive restraint systems such as airbags or automotive seat belt tensioners have experienced increased usage in vehicles to protect passengers during frontal collisions. These types of restraints require no extra action by the passenger to achieve protection. Rather, the passive restraint is automatically activated in the event of an activation worthy impact event. Various types of... Read More

Capacitive Acceleration Sensor

1912 – Accelerometers are used in a variety of applications to provide an accurate indication of an acceleration force. Because accurate detection of acceleration is often critical, accelerometers typically utilize self-testing mechanisms to check the mechanical integrity and stability of the accelerometer. In the micro-machined type of accelerometers, which are sometimes utilized in vehicle... Read More

Acceleration Sensing Module With a Combined Self-test and Ground Electrode

1946 – Accelerometers are used in a variety of applications to provide an accurate indication of an acceleration force. Because accurate detection of acceleration is often critical, accelerometers typically utilize self-testing mechanisms to check the mechanical integrity and stability of the accelerometer. In the micro-machined type of accelerometers, which are sometimes utilized in vehicle... Read More

Accelerometer With a Combined Self-test and Ground Electrode

1945 – Accelerometers are used in a variety of applications to provide an accurate indication of an acceleration force. Because accurate detection of acceleration is often critical, accelerometers typically utilize self-testing mechanisms to check the mechanical integrity and stability of the accelerometer. In the micro-machined type of accelerometers, which are sometimes utilized in vehicle... Read More

A Folded-Electrode Structure for Electromechanical Capacitive Accelerometers

1644 – Accelerometers are often utilized in various applications including navigation, guidance, microgravity measurements, seismology and platform stabilization. Conventional accelerometers are fabricated by either surface- or bulk-micromachining. The surface-micromachined devices are fabricated on a single silicon wafer, but bear low sensitivity and large noise floor. Some high resolution... Read More