Kensall D. Wise
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A Method for Low-temperature Sealing of Microcavities at Wafer-Level
2111 – Packaging is one of the most challenging and costly processes in the integrated circuits (IC) and sensor industry, and remains a bottleneck for IC commercialization. With moving components, the already challenging packaging task is complicated further for MEMS devices. Thus far, packaging methods reported in the literature are application-specific, and there is a lack of standardization... Read More
Flexible Neural Probe
3053 – Neural probes used for recording and stimulation of nerves are often fabricated as microelectromechanical (MEMS) devices or silicon-based microelectrodes. Silicon has been a choice material for this application as it provides structural integrity and can be fabricated on a scale small enough to be compatible as neural microelectrodes. However, its rigidity and fragility may not be... Read More
A Method for Compact Multilevel Electrical Integration of Microsystems
3898 – Many applications in neuroscience and neural prosthetics would benefit from having three-dimensional arrays of electrodes to allow the simultaneous monitoring of interactions among networks of neurons spanning multiple layers of brain. However, creating practical three-dimensional arrays has remained a challenge. Typically, neural probes are batch fabricated using planar processing... Read More
A Latching Thermopneumatic Microvalve for Ultra-low Power Applications
2598 – Microvalves control fluid flow in fluidics systems, and have improved control in applications where the significant power demands of a macro-scale valve would not be suitable. While microvalves offer unique advantages over their larger counterparts, such as decreased dead volume that allow faster response times, there is room for improvement in both power consumption and response time, as... Read More
Micro Gas Chromatograph
2344 – Gas chromatography systems (GC) are chemical instruments that enable the separation of a gaseous mixture. GC have applications beyond the traditional analytical lab and are commonly used in other industries such as food quality monitoring and environmental monitoring. Conventional GC systems are fragile and bulky and have limited their application in other fields. The prospect of a... Read More
Formation of Multiple Microchannels for Delivery of Fluids with High Spatial Precision
0953 – There are a number of technological areas where it is desired to deliver a fluid with high spatial precision. In one area of technology, ink jet printers seek to place drops of ink on a page by propelling the ink out of small equally-spaced nozzles. Such printers generally are less expensive and quieter while printing than laser printers. However, their printing quality is generally not... Read More