Navid Yazdi

Single-side Microelectromechanical Capacitive Accelerometer and Method of Making Same

1644d1 – UM File # 1644d1 Background Accelerometers are often utilized in various applications including navigation, guidance, microgravity measurements, seismology and platform stabilization. Conventional accelerometers are fabricated by either surface- or bulk-micromachining. The surface-micromachined devices are fabricated on a single silicon wafer, but bear low sensitivity and large noise... Read More