Office of Technology Transfer – University of Michigan

A Low Phase Noise, Low Power, Monolithic, MEMS-based Voltage Controlled Oscillator in Silicon-on-insulator Technology

Technology #2253

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Richard B. Brown
Managed By
Joohee Kim
Licensing Specialist, Physical Sciences & Engineering 734-764-8202

Researchers in the University of Michigan’s Electrical Engineering department have developed a monolithic voltage controlled oscillator using MEMS and silicon-on-insulator technology. Currently, no high performance monolithic clock is commercially available. However, many single-package clock parts are commercially available. These clocks typically use a macroscopic crystal as the time reference for the system, and tend to consume significant power when compared to the proposed technology. Additionally, the cost of the monolithic clock will be significantly less than any clock product currently available. The technology is not a discrete component, and can be placed within any semiconductor design.||