Office of Technology Transfer – University of Michigan

A Micromachined Pump for On-Chip Vacuum

Technology #2503

Questions about this technology? Ask a Technology Manager

Download Printable PDF

Categories
Researchers
Shamus P. McNamara
Managed By
Joohee Kim
Licensing Specialist, Physical Sciences & Engineering 734.764.8202
Patent Protection
US Patent 7,367,781
Publications
On-chip vacuum generated by a micromachined Knudsen pump
J. Microelectromech. Syst., Volume 14. Page 741. 2005

Background

There is growing interest in relying on micromachined systems for gas-handling applications. Current limitations to the adoption of this technology stem from device operation at high temperatures, thus requiring thermal isolation in addition to vacuum-sealed lead transfer and low parasitic capacitance.

Technology

Researchers at the University of Michigan have developed improved micromachined devices including a packaged micromachined pump for on-chip vacuum. The device has attained evacuation of a cavity to 0.46 atm using 80mW input power, while maintaining high thermal isolation between a polysilicon heater of the pump and the rest of the device.

Applications and Advantages

Applications

  • Actuation of gases for gas chromatography,-nl-spectroscopy, microplasma manufacturing.
  • Pneumatic actuation of liquids for lab-on-a-chip-nl-and chemical sensing devices.
  • Vacuum encapsulation.

Advantages

  • Can be scaled down to small dimensions,-nl-durability and simplified packaging.
  • Improved efficiency, ability to operate-nl-at high temperature.