Office of Technology Transfer – University of Michigan

High-Performance Resonators for Gyroscopes

Technology #6761

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Ali Darvishian
Managed By
Joohee Kim
Licensing Specialist, Physical Sciences & Engineering 734-764-8202
Patent Protection
US Patent Pending

Maximizing quality (Q) factor, ability of system to keep energy, is key to enhancing the performance of mechanical resonators. To maximize Q-factor of a resonator, its dissipation mechanisms should be carefully investigated and reduced. Most phenomena, which increase energy dissipation in a resonator, can be reduced by a proper choice of resonator’s material. However, anchor loss, which is due to wave propagation into the resonator substrate, cannot be easily controlled.

The world’s smallest navigation grade gyroscope can be achieved using stacked resonators

The inventors disclose a new method to reduce the anchor loss and increase the Q-factor in mechanical resonators. In this approach, similar resonators operate out-phase to each other and they are stacked together. This causes the energy which wants to propagate to the substrate, to be transferred from one resonator to the other, or in effect, the out-of-phase strains at the anchor point cancel each other thus reflecting energy back into the resonator (See attachment). This method provides a virtual strong substrate. Therefore, Q-factor of resonators increases significantly, especially in MEMS resonators, which are made on a wafer.


  • Robot navigation
  • Game controllers
  • Automotive sensing
  • Micro-unmanned-vehicle navigation
  • Non-GPS navigation system


  • High Quality factor resonators
  • Smallest navigation grade gyroscope
  • High performance gyroscopes in X and Y direction