Office of Technology Transfer – University of Michigan

3D MEMS Scanner for Real-Time Cross-Sectional Endomicroscopy

Technology #6867

Questions about this technology? Ask a Technology Manager

Download Printable PDF

Thomas Wang
Managed By
Tiefei Dong
Senior Licensing Specialist, Life Sciences 734-763-5332
Patent Protection
US Patent Pending

Endoscopic procedures are commonly performed for screening cancers originating in the epithelium of the body, such as the colon, esophagus, stomach, lung, bladder, and pancreas. Confocal endomicroscopy is a way to conduct an “optical biopsy” by taking histology-like images of the tissue of interest without the risk and complications of a traditional biopsy. This non-invasive technique is powerful but currently limited in depth of sensing, which can make identification of tumors that invade perpendicular to the surface particularly challenging.

A Monolithic Integrated Electrostatic MEMS Scanner

A new device designed at Michigan Engineering greatly expands the capabilities of endomicroscopy while maintaining small package sizing and low power requirements. A unique lever-based gimbal-like MEMS structure is used for 2D Lissajous scanning while being capable of reaching over 500μm in depth displacement, doubling the capabilities in current products. This will allow doctors to accurately distinguish depth of invasion for early cancer diagnoses.


  • 3D imaging of gastrointestinal cancer
  • Diagnostics for other epithelial cancers such as lung, bladder, and pancreatic


  • Improved visualization of tumor depth
  • Delineation of tumor margins
  • Better early cancer staging