Office of Technology Transfer – University of Michigan

Three-Dimensional Rate-Integrating Gyroscope and Fabrication Process

Technology #6997

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Jae Yoong Cho
Managed By
Joohee Kim
Licensing Specialist, Physical Sciences & Engineering 734-764-8202
Patent Protection
US Patent Pending
3-dimensional blow torch-molding of fused silica microstructures
Journal of Microelectromechan. Volume:22 Issue:6, 2013

Gyroscopes are sensors that measure the rate of rotation and angular orientation of an object. Advances in micro electromechanical system (MEMS) allow MEMS gyroscope manufacturing at low cost with sufficient accuracy. MEMS gyroscopes are used in portable electronics such as smart phones as well as in the stabilization of cameras, factory machines, and cars. Navigational systems, e.g., in autonomous cars or airplanes, are another potential application, but the accuracy of current MEMS gyroscopes do not have sufficient accuracy. Navigation requires precise position sensing, which is challenging due to errors in inertial sensors’ position calculation that grow rapidly over time. Therefore, navigational applications require MEMS gyroscopes that are significantly more accurate.

Gyroscope with Improved Accuracy

A novel MEMS gyroscope design allows improvements of several orders of magnitude in the device’s resistance to vibrations and shock as well as the resolution of the sensor. A proposed manufacturing process allows efficient construction of the design, and the gyroscope’s components result in low power requirements for the device. With these improvements, the gyroscope meets the performance requirements for Defense Advanced Research Project Agency’s (DARPA) Precise Robust Inertial Guidance for Munitions: Advanced Inertial Micro Sensors (PRIGM:AIMS) program. These advances are expected to impact the high-end industrial, automotive, aerospace, robotics, naval, and military sectors.


  • Navigational systems in robots, cars, airplanes, UAVs, space shuttles, and naval vessels
  • Industrial and healthcare sectors


  • Reduced sensitivity to vibration and shock
  • Improved sensor resolution
  • Low power

[1] Global Accelerometers, Gyroscopes, and IMU Sensors Markets (M906). Frost and Sullivan. (2013).